Fabrication of Polymer Splitter by Micro Hot Embossing Technique

This research focuses on the manufacturing of 1 by 4 multimode polymer splitter. MEMS fabricating process was first adopted for the fabrication of four inches silicon mold insert and then the micro hot embossing technique was applied to the optical class PMMA material for splitters. The BeamPROPTM simulation software was utilized for the design of optimal silicon mold insert. In the analysis of micro hot embossing process, the factorial experiment and Taguchi method were used in order to find the most significant control factor and the optimal combination of micro hot embossing parameters.